1 Day DRIE Workshop

2012-02-28
Lurie Nanofabrication Facility, The University of Michigan, Ann Arbor
Micro and Nano Machining for High Aspect Ratio Structures in Glass, Silicon, Silicon Carbide, PZT and Others...

The short course will include both classroom lectures and hands-on activities relevant to many different applications. Topics that will be covered include:

• DRIE on Si, glass, other materials
• Metrology and analysis of etched results
• Design rules, lessons learned
• Masking strategies: resists and others
• Review of LNF capabilities
• and much more!!!!

For more information: Contact David Yates at :[email protected] or 734-323-1432

For more information: http://lnf.umich.edu/index.php/2012/01/10/drie-workshop/