New capabilities to support industry through characterisation of MEMS-scale piezoelectric materials2013-06-12
Piezoelectric materials have different proporties at MEMS scale- what are they?
PiezoMEMS is an exciting new technology area that supports many rapidly growing markets, with applications in inertial sensing, resonators, RF switches and energy harvesting amongst others. NPL has an internationally leading position in measurement science and technology to support these applications, particularly in tackling one critical challenge - that of using MEMS technology to match the measurement spatial resolution for direct piezoelectric measurements, to the length scales of these developing technologies.
This webinar will focus on the industrial measurement requirements for emerging PiezoMEMS technologies and the barriers faced by product developers in establishing online metrology for quality assurance in high volume commercial applications. The development of a MEMS-based tool for the d33 parameter will be presented, which provides a unique capability to accurately evaluate the functional properties of piezoelectric materials in micro-scale materials.
The webinar will be of interest to researchers and applications engineers looking to develop or simulate micro-scale piezoelectric functional devices, to those developing instrumentation, and to those developing piezoelectric materials.