MEMS and Nanotechnology ClearinghouseLogitech CMP Workshop2008-04-15 - 2008-04-16Tufts University, Medford, MA This free workshop is organized by Logitech Ltd, a UK based manufacturer of precision polishing tools. The workshop covers R&D scale chemical mechanical planarization (cmp) of oxides, metal films and wafer substrates, using the Tribo cmp tool. Each two-hour session covers topics including pad conditioning, COF measurements and polishing of III-V substrates. It is intended for laboratories that need to planarize wafers or wafer pieces on a small scale for MEMS applications or students with an interest in cmp. Please sign up at http://www.logitech.uk.com/tufts or call Keith Torrance at (614) 444 5477 for more information. For more information: http://www.logitech.uk.com/tufts |