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Microsensor and Actuator Technology (MAT), Berlin
The Microsensor & Actuator Technology Berlin (MAT) is part of the research unit "Microperipheric Technologies" of the Technical University of Berlin
and was founded in 1987. Prof. Dr.-Ing. E. Obermeier
is the head of the MAT. Today more than 30 research scientists
are working on the field of sensor and actuator development. Main topics are the development and realization of sensors for measurement of pressure, force, acceleration, temperature, humidity, gas flow and gas concentration. Modern computer aided design methods like FEA
are used to optimize the sensor characteristic. The cleanroom facilities
include standard CMOS processes and numerous special processes, e.g. anisotropic etching, electrochemical etching and anodic bonding. Computer controlled test systems are used to characterize the devices.