|  MEMS and Nanotechnology Clearinghouse- MiSTIC- Michigan Synthesis Tools for IC's
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MISTIC is a planar process compiler for thin-film and micromachined
devices. This tool automatically generates fabrication process flows starting
from a two-dimensional geometrical device description. The synthesis method
used is based on topological sorting techniques which find all possible flows
for the device. An optimal flow is selected which maximizes the device
yield.
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