|  MEMS and Nanotechnology Clearinghouse- Introduction to Microelectromechanical (MEM) Microwave Systems
- The book first gives brief information about the microfabrication techniques used in the MEM systems in general. Then it explains the physics and operation of the MEM devices. This device physics part is generally dedicated to components used in RF MEMS. After explaining the physics the author gives the RF MEM devices one by one, explain the RF functioning of them, and give the RF performance and comparison data for whom interested in the RF side of the subject. In general the book is a good starting point for a person who is interested in the RF MEMS subject.
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