ANSYS software has evolved into a multi-physics analysis environment capable of simulating a broad range of physics including: structural, thermal, fluid , acoustics, electromagnetics, and electronic circuits. The ANSYS/Multiphysics product supports direct and indirect coupling between these different physics to facilitate accurate modeling of real world effects. Examples relevant to the MEMS community are fluid-structural, thermo-electric (Joule heating), electro-structural (piezoelectric) and electrostatic-structural.

The ANSYS/MEMS Website http://www.ansys.com/ansys/ provides an overview of the ANSYS MEMS Initiative, and also recent technical papers showing ANSYS in action, ANSYS Solutions articles containing some serious MEMS analysis, and a basic MEMS materials database.

ANSYS.NET http://ansys.net/ansys/ an ansys user's resource, is an extensive collection of ANSYS-related resources.

The XANSYS mailing list http://www.xansys.org/ is for discussion among ANSYS users about program bugs/ideas/modelling techniques, hardware, FEA employment, and related topics.