MEMS and Nanotechnology Clearinghouse- Micro Electro Mechanical Actuator Arrays
- Web Pages of Karl Böhringer contain information, papers, and animations about manipulation strategies with microfabricated actuator arrays. The electrostatic actuators are fabricated in a single-crystal silicon etching and metallization (SCREAM) process. They were built in the National Nanofabrication Facility at Cornell University.