COMSOL MEMS Module addresses design issues that arise in
the micro-world. It models physical phenomena in actuators and sensors
plus microfluidic and small piezoelectric devices. Because MEMS Module
is built over COMSOL Multiphysics platform it can handle
electromagnetic- structural, thermal-structural, fluid-structure (FSI),
electromagnetic-fluid interactions or any other combination of
multiphysical couplings needed in the MEMS world.