MEMS and Nanotechnology Clearinghouse- COMSOL Inc.
- COMSOL MEMS Module addresses design issues that arise in the micro-world. It models physical phenomena in actuators and sensors plus microfluidic and small piezoelectric devices. Because MEMS Module is built over COMSOL Multiphysics platform it can handle electromagnetic- structural, thermal-structural, fluid-structure (FSI), electromagnetic-fluid interactions or any other combination of multiphysical couplings needed in the MEMS world.