Comprehensive Microsystems, is a new 3-volume reference work on Microelectromechanical Systems (MEMS). MEMS are micron-sized devices that sense or manipulate a physical environment. They are used in a wide range of industrial products, from high-tech instrumentation to disposable consumer items, including airbag sensors in automobiles, laser jet printer heads and blood pressure monitors.

Given their increased use, MEMS research is continually evolving, generating the need for an all-inclusive, up-to date reference on these devices. Comprehensive Microsystems will fill this gap by facilitating access to established research by both academics and professionals in the field. This work is designed to be both an essential reference tool for those entering the field as well as a useful handbook for MEMS researchers in industry and academia.