| - Advanced MicroSensors
-
Offers design, development and volume manufacturing foundry services
for 3" and 6" wafer MEMS, MOEMS and thin film devices. Specialties
include CMOS-compatible processing, magnetic materials, high
aspect-ratio UV-LIGA microlithography, through-mask electrodeposition,
CMP, deep-silicon Bosch ICP etching, dry and wet release etching and
super-critical drying. AMS features a large, modern Class 100
cleanroom with Class 10 microlithographic coating.
|
MEMS and Nanotechnology Clearinghouse