(Formerly ACT MicroDevices.)
Maintains a full-service micro foundry that includes: highly
characterized thin film and optical coatings, solder and microwave
circuit metallization, and precision wet and dry etching. Specializes
in Silicon Optical Bench Fabrication, Bulk Micromachining, Low Stress
Nitrides, and Deep RIE of silicon, through both the Bosch process and the
cryogenic smooth sidewall process. Most of our services are available on
100mm, 125mm, 150mm (Thin Films on 200mm). Haleos can custom engineer
processes and has design and modeling expertise.
