|  MEMS and Nanotechnology Clearinghouse- Fundamentals of Microfabrication
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By Mark Madou.
With nanotechnology and microengineering
being among the top priority research areas for the United States
over the next decade, Fundamentals of Microfabrication is an
important and timely work. It is the first book to examine all aspects
of the attempt to build functional devices at a molecular
size.
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