An information portal for the
MEMS and Nanotechnology community
What is MEMS?
The Berkeley Sensor and Actuator Center
The Berkeley Sensor and Actuator Center (BSAC) is a NSF/Industry/University cooperative research center funded by the Na...
The Carnegie Mellon University MEMS Laboratory
The CMU MEMS Laboratory is developing miniature sensor and actuator systems made using batch-fabrication processes, espe...
The Microsystems Technology Laboratories (MTL) at MIT
This page centralizes information about the FAB's and research going on at the MTL at MIT, including research on MEMS at...
The Stanford Center for Design Research (CDR)
The Stanford CDR maintains information on a wide variety of research projects that include collaborative design, nationa...
Tufts University, Electro-Optics Tech Center
UCLA Micromanufacturing Laboratory
University of California Santa Barbara
Has two research groups, led by Prof. Noel MacDonald http://www.engr.ucsb.edu/~memsucsb/ and Kim Turner http://www.engr....
University of Illinois at Urbana-Champaign,MEMS at UIUC
University of Southern California
One major current thrust is to develop various acoustic MEMS using piezoelectric films or substrates.
University of Stanford, Transducers Lab
Introductions to MEMS