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MEMSnet Home: MEMS-Talk: off-axis wafer etching
off-axis wafer etching
2003-04-23
li zhiping
2003-04-23
David Nemeth
2003-04-24
transene
off-axis wafer etching
li zhiping
2003-04-23
Hi,
I want to ask a question. If I make a protecting pattern, say by LTO,on a
weird wafer surface, which has a 9 degree to <100>, and put it in KOH or
TMAH for tens minutes, Could the wafer be etched to the <100> at the
unprotected area? Thanks!
Zhiping





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