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MEMSnet Home: MEMS-Talk: tooling for HF release etch
tooling for HF release etch
2003-04-30
Phillipe Tabada
tooling for HF release etch
Phillipe Tabada
2003-04-30
Hi Robert,

     Another solution a collegue of mine used was to cut out the flat
circular portion of a teflon petri dish and buy yourself teflon screws and
nuts which can be used to hold your die in place.  This way you can have a
holder suitable for the desired die size and is compatible with HF.  Just
make sure the holder you make goes through a full RCA clean to remove any
contamination.

Phil Tabada


>From: "Kirt & Erika Zipf-Williams" 
>Reply-To: General MEMS discussion 
>To: "General MEMS discussion" 
>Subject: Re: [mems-talk] tooling for HF release etch
>Date: Tue, 29 Apr 2003 11:06:43 -0700
>
>An alternative is to place the dice on a Gel-Pak insert for etching.
>The dice stick pretty well in HF.
>     --Kirt Williams, Ph.D.   consultant
>
>----- Original Message -----
>From: Robert Dean 
>To: General MEMS discussion 
>Sent: Monday, April 28, 2003 5:36 PM
>Subject: [mems-talk] tooling for HF release etch
>
>
> >
> > >Hello,
> >
> > I am looking for a ladle-like tool or small "bucket" for transferring
>die
> > to and from, and to hold them in a beaker of HF for a standard SOI MEMS
> > process release etch.  Any suggestions on what and where to purchase it?
> >
> > Sincerely,
> >
> > Robert Dean
> >
> >
> > _______________________________________________
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>
>
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