A MEMS Clearinghouse® and information portal
for the MEMS and Nanotechnology community
RegisterSign-In
MEMSnet Home About Us What is MEMS? Beginner's Guide Discussion Groups Advertise Here
News
MEMSnet Home: MEMS-Talk: Fabrication of MEMS Device
Fabrication of MEMS Device
2003-05-07
Amit Savkar (2 parts)
2003-05-12
Cedric SIRE
2003-05-12
Chris Sanders
2003-05-08
Stonefield, Mark
Fabrication of MEMS Device
Amit Savkar
2003-05-07
Dear All,
This is Amit Savkar a Phd Candidate at University of Connecticut at Storrs.
I am a new member to this discussion group, and would like to ask a few
basic questions regarding fabrication of MEMS device. Our research group is
actively seeking vendors who can actually fabricate a device, with decent
reliability. We have particulars of this device and would like to know
vendors, universities who had reliable established MUMPS process for
fabrication.
It would be highly appreciated if any fellow members can throw light on the
same.
Thanks
Regards
Amit Savkar

PhD Candidate
University of Connecticut
Department of Mechanical Engineering
Dynamics and Vibration Lab
191 Auditorium Road U 3139
Storrs CT 06226
Lab : 860 486 5339

Amit Savkar (E-mail).vcf (text/x-vcard, 379 bytes)
reply
Events
Glossary
Materials
Links
MEMS-talk
Terms of Use | Contact Us | Search
MEMS Exchange
MEMS Industry Group
Coventor
Harrick Plasma
Tanner EDA
Mentor Graphics Corporation
Process Variations in Microsystems Manufacturing
Tanner EDA by Mentor Graphics
Nano-Master, Inc.