At 12:02 PM 5/8/2003 -0400, you wrote:
>Hi Everyone,
>
>   I am trying to etch 2 micron thick membrane. I am
>using TMAH as the etchant, but the etchrate of TMAH
>maintained at 80C is varying a lot.
>
> Can anyone suggest a procedure that is reproduce able
>to a fairly large extent.
>
>regards,
>sriram

Are you using an etch stop?

--
Mark Fuller
Microelectronics Fabrication Facility
Washington State University
Dana Hall 102
Pullman, WA  99164-2711
(509)335-1797