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MEMSnet Home: MEMS-Talk: wet etch ZnS
wet etch ZnS
2003-05-16
Zhimin J Yao
wet etch ZnS
Zhimin J Yao
2003-05-16
Hello,

Does anybody know how to wet etch ZnS (about 1 um thick).  I do not want to
plasma etch it since ZnS will contaminate the chamber.

Any information is appreciated.

Jamie



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