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boron implant
2003-05-21
Ravi Shankar
2003-05-22
[email protected]
boron implant
Ravi Shankar
2003-05-21
Hi
i was trying to implant boron through 1000A SiO2. After annealing the
wafer, we tried to strip the SiO2 in HF and BOE. The sample dewetted in HF
failed to give any sheet resistance value in four probe measurement,
whereas one done in BOE gave the reading.
can anyone suggest the reason behind it.

Ravi Shankar


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