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MEMSnet Home: MEMS-Talk: etch of tungsten oxide
etch of tungsten oxide
2003-05-21
Allen Chou
2003-05-22
Justin Borski
2003-05-22
[email protected]
etch of tungsten oxide
Allen Chou
2003-05-21
Hi,

Does any one know any chemical that can remove the
oxidized surface tungsten film without appreciable
damage on the tungsten?

Thanks,

Allen

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