[help] selective Ni etchant which does not
attack Cu
Muralidhar K. Ghantasala
2003-05-21
Try ammonium per sulphate (20% approximately). It works beautifully.
We use that regularly
cheers
Muralidhar
>>> [email protected] 05/21/03 11:02AM >>>
I'm looking for the selective Ni etchant which does not attack Cu.
I tried with HNO3. It works with more than 100um dimension.
But now I have to work with 50um dimension. So undercutting is too
severe.
After etching only 30um left. There was about 10um undercutting.
Actually Ni is NiV.
Thanks in advance.