Robert,

Our facility has a Flexus Film Stress measurement tool that could take those
measurements for you.

Please e-mail me at [email protected], and we can discuss further.

Neal Ricks

Wafer Fab Manager
Shipley Co., LLC
EIF Division
Opto Group-Blacksburg



Robert D White  wrote:
I am looking for someone to do some pre- and post- wafer curvature
measurements for estimation of residual stresses evolved during LPCVD
deposition. I would be doing the LPCVD step myself, and want to send
the wafers somewhere to get the measurements done before and after.
Does anyone offer this service or know where I might look?

Many thanks,

Rob
--
Robert D. White
Graduate Student Research Assistant
Vibrations and Acoustics Lab, 2200 EECS
Mechanical Engineering
University of Michigan
Ann Arbor, MI 48109

(734)936-3824
[email protected]

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