Robert,
As I remember Michigan has a great MEMS program. Why not talk to those
guys? A little cooperation between departments might not hurt?
Solid State Electronics Lab http://www.eecs.umich.edu/ssel/index.php
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Philip D. Floyd, Ph.D.
Iridigm Display Corporation
2415 Third Street, Suite 235
San Francisco, CA 94107
ph: (415) 626-8800 x138
fax: (415) 626-9775
email: [email protected]
web: http://www.iridigm.com/
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-----Original Message-----
From: Robert D White [mailto:[email protected]]
Sent: Wednesday, May 21, 2003 7:14 AM
To: [email protected]
Subject: [mems-talk] Wafer Curvature Measurements
I am looking for someone to do some pre- and post- wafer curvature
measurements for estimation of residual stresses evolved during LPCVD
deposition. I would be doing the LPCVD step myself, and want to send
the wafers somewhere to get the measurements done before and after.
Does anyone offer this service or know where I might look?
Many thanks,
Rob
--
Robert D. White
Graduate Student Research Assistant
Vibrations and Acoustics Lab, 2200 EECS
Mechanical Engineering
University of Michigan
Ann Arbor, MI 48109
(734)936-3824
[email protected]
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