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MEMSnet Home: MEMS-Talk: SiCr
SiCr
2003-05-21
sbalacha
SiCr
sbalacha
2003-05-21
Hi,

Can anyone tell me what is the typical etchant for SiCr. SiCr is
deposited on quartz to approx 1000A thick. I believe BHF can be used but
can someone help me find the etch rates.

Thanks

Srinath


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