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MEMSnet Home: MEMS-Talk: Etching of TiO2
Etching of TiO2
2003-05-26
Karolin Mellert
Etching of TiO2
Karolin Mellert
2003-05-26
Hi,
does anyone know how to etch thin (500 nm) films of TiO2 with aspect
ratios of about 1:5 (or higher) or where to find literature on this subject?
Thank you,
Karolin
--
Dipl.-Phys. Karolin Mellert
[email protected]


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