you may want to check http://www.micromachines.com/, they have good prices
($20,$50) for bow, stress measurements.

Good Luck

_________________________
Erhan Ata
NanoDevices, Inc.
[email protected]
Tel :805-696-9002 ext.203
Fax:805-696-9003


-----Original Message-----
From: Robert D White [mailto:[email protected]]
Sent: Wednesday, May 21, 2003 7:14 AM
To: [email protected]
Subject: [mems-talk] Wafer Curvature Measurements


I am looking for someone to do some pre- and post- wafer curvature
measurements for estimation of residual stresses evolved during LPCVD
deposition.  I would be doing the LPCVD step myself, and want to send
the wafers somewhere to get the measurements done before and after.
Does anyone offer this service or know where I might look?

Many thanks,

Rob
--
Robert D. White
Graduate Student Research Assistant
Vibrations and Acoustics Lab, 2200 EECS
Mechanical Engineering
University of Michigan
Ann Arbor, MI 48109

(734)936-3824
[email protected]