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MEMSnet Home: MEMS-Talk: How to peel PDMS off after it bonded on the glass slide
How to peel PDMS off after it bonded on the glass slide
2003-05-26
YI-CHUN CHEN
How to peel PDMS off after it bonded on the glass slide
YI-CHUN CHEN
2003-05-26
Hi everyone,

Could anybody give me some suggestions about peeling PDMS off after it bonded on
the glass slide. Both the PDMS and the glass slide were treated in an oxygen
plasma(50W; 30sec; 0.3 torr) before bonding. Now the bonding strength between
the PDMS and the glass slide is too strong to separate them.
Thanks! Your opinion will be highly appreciated.

Sincerely,

Yi-Chun



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