Try ABM in San Jose, CA.  They may be able to provide standalone chuck/mask
frame.  Talk to Dan Maurer, 408-972-5085

Mac McReynolds
R&D Manager
Caliper Technologies Corp.
605 Fairchild Drive
Mountain View, CA 94043-2234
Tel:  650-623-0710
Fax:  650-623-0521

> ----------
> From:         Sreemanth M Uppuluri
> Reply To:     General MEMS discussion
> Sent:         Friday, May 23, 2003 9:57 AM
> To:   General MEMS discussion
> Subject:      [mems-talk] Mask Aligner
>
> Hello All,
>
> I am looking for a vacuum chuck similar to the one found in mask aligners
> for performing contact lithography experiments. Please let me know if
> anyone has some information regarding it.
>
> Thanks
> Sreemanth
>
> ************************************************************
> Sreemanth M Uppuluri
> Graduate Research Assistant
> Center for Laser Micro-Fabrication
> School of Mechanical Engineering
> Purdue University
>
> Phone: 765-494-5638 (Office), 765-463-9560 (Home)
> Email: [email protected], [email protected]
>
>
>
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