Dave,
     Contact me directly if possible.  We are doing a variety of anti stiction,
surface tension modification systems.  Some are based on variations of the old
HMDS system, some are plasma, we have also done plasma silane deposition.  Bill
Moffat Yield Engineering Systems.

-----Original Message-----
From: Dave Kharas [mailto:[email protected]]
Sent: Friday, May 16, 2003 8:16 AM
To: [email protected]
Subject: [mems-talk] vapor phase anti-stiction coatings


Hi all,
I was wondering if people are aware of a good
vapor phase anti-stiction coating that can
be applied to previously released devices, at a
relatively low temperature around 100C.
I am aware of some work at Berkeley, applying
DDMS and FDTS from a water plasma.
Are there commercial systems available?
At one point I thought I saw a post from Yield
Engineering about a system used on the TI DMD.
Is this approach similar to HMDS wafer priming?
ADI patent info and perusal through a Gelest catalog
suggests that they applied a rather bulky looking
Siloxane prior to packaging. Has anyone else had
experience with this?

Thanks in advance for your feedback.

Regards,

Dave Kharas Ph.D.




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