Hi,

Does any one have similar problem on Au etching with
negative etched edge profile? I would like to get a
positive tapered profile so that step coverage issue
can be reduce for the next film deposition.
Theoretically, one should get a positive taper etch
from isotropic etching process. However, the result is
inconsistent. Cr and Ti adhesion metal showed the same
negative result. Any suggestion?

Thanks,

Allen Chou

__________________________________
Do you Yahoo!?
Yahoo! Calendar - Free online calendar with sync to Outlook(TM).
http://calendar.yahoo.com