HI Priyank
What kind of etching do you plan to do?
Which chamber? If you give me your baseline recipe and tell me what was
wrong,
Maybe I can help you tune the recipe in.
ShuTing
Electrical Engineering, UCLA
-----Original Message-----
From: mems-talk-bounces@memsnet.org
[mailto:mems-talk-bounces@memsnet.org] On Behalf Of Priyank Gupta
Sent: Wednesday, June 11, 2003 4:15 PM
To: mems-talk@memsnet.org
Subject: [mems-talk] RIE process parameters for Si Etching
hi!,
I have some problem with etching of silicon using RIE process. I'm
wodering if
anyone knows about the process parameter (about 1-2 micrometer), gas
used,
photresist, pressure, rf power etc. for etching of Si.
Thanks
Priyank Gupta
Research Assistant
ECEN
Oklahoma State University
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