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MEMSnet Home: MEMS-Talk: RE: laser Machining (Shay Kaplan)
RE: laser Machining (Shay Kaplan)
2003-06-27
Ping Li
RE: laser Machining (Shay Kaplan)
Ping Li
2003-06-27

-----Original Message-----
Hi, Shay:
What is accuracy requirements, placement and machining tolerance? Laser
machining may not get very tighten tolerance. Since it is Si, have you tried
DRIE (deep reactive ion etch)?
Regards,

Ping Li
Manager of Process Lab
NP Photonics, Inc.
5706 Corsa Ave.
Westlake Village, CA 91362
818-991-7044 Ext. 218
818-991-7128 (Fax)
mailto://[email protected]
http://www.npphotonics.com


Original message:

Date: Thu, 26 Jun 2003 18:22:33 +0200
From: Shay Kaplan 
Subject: [mems-talk] laser Machining
To: General MEMS discussion 
Message-ID: <[email protected]>
Content-Type: text/plain; charset=x-user-defined

Hello,
Does anybody know anyone giving good quality laser machining services?
We need to cut thru 500u silicon with cut width no wider than 30-40u
thanks

shay kaplan




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