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MEMSnet Home: MEMS-Talk: Mumps structure length prevent stiction
Mumps structure length prevent stiction
2003-07-02
rakesh babu
2003-07-02
weiwei2
Problem in stiction
2003-07-06
ramji dhakal
Nitinol Software
2003-07-02
Alberto Borboni
Gold film fail at high temperature
2003-07-02
Zhengfan Zhang
2003-07-03
beaton@npphotonics (Bill Eaton)
Mumps structure length prevent stiction
rakesh babu
2003-07-02
hi all,

      I am designing structures using Mumps process .

    what is the maximum length of cantilever and bridge type structures using
both poly1
and poly2 layers so that stiction does not occur.

 thank you so much for the help.

regards,
rakesh.




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