A MEMS Clearinghouse® and information portal
for the MEMS and Nanotechnology community
RegisterSign-In
MEMSnet Home About Us What is MEMS? Beginner's Guide Discussion Groups Advertise Here
News
MEMSnet Home: MEMS-Talk: Poly polishing slurry
Poly polishing slurry
2003-07-04
Kumar Soma
2003-07-07
Michaela Wullinger
Poly polishing slurry
Kumar Soma
2003-07-04
Dear all,

I am looking for different types of slurry that can be used to polish poly. Also
any suggestion on type of pad and recipe are greatly appreciated. Any
information of surface roughness related to it will be highly beneficial. Many
thanks.

Kumar



---------------------------------
Want to chat instantly with your online friends? Get the FREE Yahoo!Messenger
reply
Events
Glossary
Materials
Links
MEMS-talk
Terms of Use | Contact Us | Search
MEMS Exchange
MEMS Industry Group
Coventor
Harrick Plasma
Tanner EDA
Nano-Master, Inc.
MEMS Technology Review
Mentor Graphics Corporation
Addison Engineering