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MEMSnet Home: MEMS-Talk: platinum on SU-8
platinum on SU-8
2003-07-01
Chen-Han Lee
2003-07-03
Kirt & Erika Zipf-Williams
2003-07-07
sokwon Paik
2003-07-07
Chen-Han Lee
2003-07-07
Mighty Platypus
2003-07-09
Chen-Han Lee
2003-07-07
Kirt & Erika Zipf-Williams
2003-07-01
[email protected]
2003-07-08
[email protected]
platinum on SU-8
sokwon Paik
2003-07-07
I do not recommend evaporation method.
As platinum melting temperature is very high and vapor
pressure is very low even at Au melting temperature,
SU-8 layer could be easily burned by high temperature
of evaporator temperature.
Try sputtering.

Regards,

Sokwon Paik

--- Kirt & Erika Zipf-Williams
 wrote:
> > Good day everyone,
> > I am a research student in U.K.
> > Could anyone please tell me wome ways i can
> deposite platinum film on
> SU-8?
> > Any suggestions are welcomed.
> > Thank you for your time.
> > Chen-Han Lee


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