Re: AW: [mems-talk] Protect backside of Si wafer from TMAH
nga
2003-07-08
Yes,
It is possible. We use a home-made stainless steel holder like ammt and it
work well all the time.
>hi all,
>I need a wafer holder, too.
>
>My requriement is to protect the back and the edge of the wafer
>but without leaving an residuals an the front side.
>I couldn't figure out whether it is possible with the recommended wafer
>holders.
>
>regards
>Michaela
>
>>-----Ursprungliche Nachricht-----
>>Von: Bill Flounders [mailto:[email protected]]
>>Gesendet: Montag, 7. Juli 2003 18:21
>>An: General MEMS discussion
>>Betreff: Re: [mems-talk] Protect backside of Si wafer from TMAH
>>
>>
>>Take a look at:
>>http://www.ammt.de/html/wafer_holders.html
>>
>>Bill Flounders, Ph.D.
>>Technology Manager
>>Berkeley Microlab
>>
>>
>>Pimpin Alongkorn wrote:
>>> Dear Folk,
>>>
>>> I would like to purchase a wafer holder for wet etching that can protect
>>> a backside of wafer from etchant solution such as HF, TMAH and KOH.
>>> Could you recommend me a Japan company (or other countries are O.K.)? It
>>> will be invaluable help for me. Thank you very much.
>>>
>>> Alongkorn Pimpin
>>> THT laboratory
>>>
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>>
>>
>>
>>
>
>
>_______________________________________________
>[email protected] mailing list: to unsubscribe or change your list
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>Visit us at http://www.memsnet.org/
>
>
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Nga. P.Pham, Ph.D
Delft University of Technology
Faculty of Electrical Engineering, Mathematics and Computer Science (EEMCS)
Delft Institute of Microelectronics and Submicrontechnology (DIMES)
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