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News	MEMSnet Home: MEMS-Talk: Used equipment for HF vapor dry etch of SiO2 Used equipment for HF vapor dry etch of SiO2 2003-07-08 Changping 2003-07-08 Kirt & Erika Zipf-Williams 2003-07-09 Changping 2003-07-09 Changping PECVD of 8" wafer and 3" glass wafer 2003-07-09 Honggang Jiang 2003-07-09 Andy McQuarrie 2003-07-10 Changping 2003-07-10 [email protected] 2003-07-11 Roger Shile Used equipment for HF vapor dry etch of SiO2 Changping 2003-07-08 Hi, I am wondering if any body know where there is such an equipment for sale. What we need to do is to do SiO2 sacrificial etch by HF vapor. We've a limited budget so we prefer an used equipment with low price. Thank you very much and appreciate your reply! Changping GIF89a³ÿ`Ï`Ï/Ï`/ÿ//`/ÿ`/ÿÿÿ!ÿ NETSCAPE2.0!ù ,UÉI«&ë¯D(QBQ£*¤ 8 K ¨+Ð·Cô~CÉ8 :J¯ reply
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