Its pretty standard to use 5" masks for 4" wafers.

-Mike


>>> [email protected] 07/16/03 11:07 AM >>>

Hi all,

Whats the typical correlation between the sizes of photomasks and wafers
in
MEMS fabrication? If I were to fabricate microdevices on 4" wafers, do I
need
4" or 5" photomasks? I learned from an Internet site that the masks
should be
1" larger than the wafers to be used. Is this customary or masks of the
same
size as wafers can also be used? Anybody can clarify this issue for me?

Thanks,
Tom Fan


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