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MEMSnet Home: MEMS-Talk: Spin-on process of polyethylene and polypropylene
Spin-on process of polyethylene and polypropylene
2003-07-18
Lijun Jiang
Spin-on process of polyethylene and polypropylene
Lijun Jiang
2003-07-18
Hi, all:

Does anyone have experience on processing techniques
for apply layer of polyethylene or polypropylene
materials on silicon wafers. The issues I want to know
include:

1. What type of process I can use? Can I use spin-on
just like for applying photoresist or polyimide?

2. Is there any suppliers of the polyethylene and
polypropylene for MEMS applications?

3. It will be highly appreciated if you can provide
some references.

thank you very much

Lijun

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