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MEMSnet Home: MEMS-Talk: Lift off for Pt Alumina wafers
Lift off for Pt Alumina wafers
2003-07-23
Dipankar Ghosh
Lift off for Pt Alumina wafers
Dipankar Ghosh
2003-07-23
Hi all,
      I have been trying to do lift off of Pt on BST/Alumina substrate for some
time using negative resist.This recipe works perfectly for Si/SiO2/BST but not
for alumina.
        Does anybody have any suggestions/ experience on this topic.
        Also does anybody know any wet etchant that will etch Pt but not
BST(Barium strontium titanate).Any relevant info will be highly appreciated.
          Thanks in advance,
                      Dipankar



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