A MEMS Clearinghouse® and information portal
for the MEMS and Nanotechnology community
RegisterSign-In
MEMSnet Home About Us What is MEMS? Beginner's Guide Discussion Groups Advertise Here
News
MEMSnet Home: MEMS-Talk: polysilicon etch back
polysilicon etch back
2003-07-24
Yilei Zhang
2003-07-27
[email protected]
polysilicon etch back
[email protected]
2003-07-27
You might try chemical mechanical polishing. There is a good company located
in Tempe, Az called Total Fab solutions that can help you out. Ask for Steve
Horowitz. Bob Henderson

reply
Events
Glossary
Materials
Links
MEMS-talk
Terms of Use | Contact Us | Search
MEMS Exchange
MEMS Industry Group
Coventor
Harrick Plasma
Tanner EDA
Tanner EDA by Mentor Graphics
Process Variations in Microsystems Manufacturing
MEMStaff Inc.
Mentor Graphics Corporation