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MEMSnet Home: MEMS-Talk: Preparing and patterning glass frit for wafer bonding
Preparing and patterning glass frit for wafer bonding
2003-07-30
A.K.Ismail
Preparing and patterning glass frit for wafer bonding
A.K.Ismail
2003-07-30
Dear All,

Does anybody know how to prepare/deposit and to pattern a glass frit down to
150um resolution other than screen printing technique for wafer bonding e.g
photolithography?. Can we maintain the 150um pattern resolution and maintain
it thickness during and after the bonding process?.
Thank you.

A.K.Ismail



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