A MEMS Clearinghouse® and information portal
for the MEMS and Nanotechnology community
RegisterSign-In
MEMSnet Home About Us What is MEMS? Beginner's Guide Discussion Groups Advertise Here
News
MEMSnet Home: MEMS-Talk: Q: tantalum silicide
Q: tantalum silicide
2003-07-30
Ramesh C
Q: tantalum silicide
Ramesh C
2003-07-30
Hi
I need to grow tantalum silicide thin films on Si. I tried depositing a thin
film of Ta on Si and then sinter it at 900 C in a environment controlled
furnace. dint work. too much oxygen whatever i do. does anyone know any good and
easy method to get TaSi2 thin films. are they directly available. and does
anyone ahve the recipes for the same?

thanks
--
__________________________________________________________
Sign-up for your own FREE Personalized E-mail at Mail.com
http://www.mail.com/?sr=signup

CareerBuilder.com has over 400,000 jobs. Be smarter about your job search
http://corp.mail.com/careers


reply
Events
Glossary
Materials
Links
MEMS-talk
Terms of Use | Contact Us | Search
MEMS Exchange
MEMS Industry Group
Coventor
Harrick Plasma
Tanner EDA
Nano-Master, Inc.
MEMStaff Inc.
Process Variations in Microsystems Manufacturing
Harrick Plasma, Inc.