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MEMSnet Home: MEMS-Talk: Ni/V Sputtering
Ni/V Sputtering
2003-07-31
David Ovrokzky
Ni/V Sputtering
David Ovrokzky
2003-07-31
Hi All,

I have tried to sputter the Ni 7%V on glass in MRC-943.
The deposit is very brittle.
We have an experience only with Al sputtering.

Can anybody recommend me a suitable recipe.

Thanks


David


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