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MEMSnet Home: MEMS-Talk: Mask Clean
Mask Clean
2003-07-31
Lin, Yaojian
2003-07-31
Mighty Platypus
2003-07-31
Hong Wu
2003-07-31
Kirt & Erika Zipf-Williams
2003-08-04
Marcus
2003-07-31
[email protected]
2003-08-01
hengcw
Silicic acid for TMAH etch
2003-08-03
kris
2003-08-01
[email protected]
Mask Clean
Lin, Yaojian
2003-07-31
Hello Friends,

I am looking for the methods to clean the dirty mask, which may have some
polymer spots.

Could you please give me some clue?

With many thanks,

Yaojian Lin




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