A MEMS Clearinghouse® and information portal
for the MEMS and Nanotechnology community
RegisterSign-In
MEMSnet Home About Us What is MEMS? Beginner's Guide Discussion Groups Advertise Here
News
MEMSnet Home: MEMS-Talk: Q factor for metallic microcantilevers
Q factor for metallic microcantilevers
2003-07-31
W.H. Teh
Q factor for metallic microcantilevers
W.H. Teh
2003-07-31
Hi to all,

I was wondering if anyone of you know of the typical Q factors for a Ni or
Au microcantilever measuring about 7um (l) x 3um (w) x 400nm (t)? More
generally, anyone measured the Q factors of metal microcantilevers (should
be reasonably low as compared to Si or quartz) and can he or she provide me
with papers and etc? Grateful thanks!

Weng Hong

reply
Events
Glossary
Materials
Links
MEMS-talk
Terms of Use | Contact Us | Search
MEMS Exchange
MEMS Industry Group
Coventor
Harrick Plasma
Tanner EDA
MEMS Technology Review
Harrick Plasma, Inc.
MEMStaff Inc.
Addison Engineering