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MEMSnet Home: MEMS-Talk: Ti etchant with selectivity to Al(0.5%Cu)
Ti etchant with selectivity to Al(0.5%Cu)
2003-08-01
Lin, Yaojian
2003-08-04
David Ovrokzky
2003-08-04
Rick Morrison
Ti etchant with selectivity to Al(0.5%Cu)
Lin, Yaojian
2003-08-01
Dear Friends,

I am working on the etchant for 1000A Ti with selectivity to Al(0.5%Cu). I
tried to use diluted (100:1) HF. But it didn't work.

Could you please give me some help?

With many thanks,

Yaojian Lin



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