If you have a crystal monitor in your deposition system, you could compare
the crystal monitor reading to a thickness measurement done on a step edge
using a profilometer.  You'd have to have a reasonable guess at the acoustic
impedance - I don't know how much uncertainty that would introduce if there
was an error in that parameter.

David Nemeth
Senior Engineer
Sophia Wireless, Inc.
14225-C Sullyfield Circle
Chantilly, VA


-----Original Message-----
From: [email protected]
[mailto:[email protected]]On
Behalf Of anshu mehta
Sent: Wednesday, August 06, 2003 4:08 AM
To: [email protected]
Subject: [mems-talk] Density measurement


Hi!

Does anyone have suggestions on ways to measure
density for thin films?

Thanks,
Anshu.


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