Dear all,

is there anyone, who has worked on structuring platinum with wet
etchants? I have tried aqua-regia (3parts HCl, 1part HNO3) of 36 %,
but could not remove any Pt from my wafers. I am using ordinary
resist on top of the Pt for structuring.

Any suggestions on aqua regia or other chemicals that could etch
Pt are greatly appreciated.

Regards,

Michael
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| Michael Koch                                   |
| University of Southampton                      |
| Department of Electronics and Computer Science |
| Southampton SO17 1BJ                           |
| England                                        |
|                                                |
| Tel.: +44 (0)1703 593737                       |
| Fax.: +44 (0)1703 593029                       |
| email: [email protected]                      |
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